中国机械工程 ›› 2011, Vol. 22 ›› Issue (3): 363-366.

• 机械基础工程 • 上一篇    下一篇

磁控溅射制备Cr7C3多层复合镀层及其耐磨性能

贾贵西1;李言1;袁启龙1;崔凤奎2
  

  1. 1.西安理工大学,西安,710048
    2.河南科技大学,洛阳,471003
  • 出版日期:2011-02-10 发布日期:2011-03-02
  • 基金资助:
    国家自然科学基金资助项目(50975229);国家重点基础研究发展计划(973计划)资助项目(2009CB724406) 
    National Natural Science Foundation of China(No. 50975229);
    National Program on Key Basic Research Project (973 Program)(No. 2009CB724406)

Preparation and Wear Resistance Performance of Cr7C3 Multilayer Composite Coatings by Magnetron Sputtering

Jia Guixi1;Li Yan1;Yuan Qilong1;Cui Fengkui2
  

  1. 1.Xi’an University of Technology, Xi’an, 710048
    2.Henan University of Science and Technology, Luoyang,Henan, 471003
  • Online:2011-02-10 Published:2011-03-02
  • Supported by:
     
    National Natural Science Foundation of China(No. 50975229);
    National Program on Key Basic Research Project (973 Program)(No. 2009CB724406)

摘要:

采用闭合场非平衡磁控溅射技术,通过控制溅射过程工艺参数制备出Cr7C3多层复合镀层。用X射线衍射仪对镀层微观结构进行分析,用透射电子显微镜观测镀层的表面形貌和断口形貌,对镀层的附着强度、硬度、摩擦和磨损性能进行了测试,并用光学显微镜观察了镀层磨损形貌特征。结果表明:镀层的结构是非晶态的,主要由Cr7C3组成,还有少量的Cr3C2和其他物质;镀层微观结构均匀致密;镀层有较好的结合力、较高的硬度、良好的载荷承载能力和寿命可靠性,有优异的摩擦和耐磨性能,在大气中滑动干摩擦因数稳定在0.10~0.15之间,磨损率大约为2.26×10-16m3/(N·m)。

关键词: 磁控溅射, Cr7C3, 镀层, 耐磨性能

Abstract:

Using closed field unbalanced magnetron sputtering ion plating technique, Cr7C3 multilayer graded composite coatings was preparated by adjusting sputtering process parameters. The microstructure of the coatings was analyzed by a X-ray diffraction. Surface and cross-sectional morphologies were observed by the transmission electron microscopy. Adhesion, hardness, and friction and wear behaviors were tested. Wear scars was observed by the optical microscope. Results indicate that the Cr7C3 coatings microstructrue is amorphous phase structrue, mainly consists of primary Cr7C3 particles, a small amount of Cr3C2 and others particles, and is fine, dense and uniform. The coatings has good adhesion and high hardness, good payload carrying capacity and life reliability, excellent friction coefficient and wear resistance performance, and the sliding dry friction coefficient is stabilized in the range 0.15~0.10, the wear rate is about 2.26×10-16 m3/(N·m) in air.

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