虚拟晶圆制造双臂自动组合装置的实现

J4 ›› 2009, Vol. 20 ›› Issue (23): 2871-2875.

虚拟晶圆制造双臂自动组合装置的实现

李飞;伍乃骐

广东工业大学，广州，510006

出版日期:2009-12-10 发布日期:2010-01-29

A Virtual Dual-arm Cluster Tool in Wafer Fabrication

Li Fei;Wu Naiqi

Guangdong University of Technology，Guangzhou，510006

Online:2009-12-10 Published:2010-01-29

摘要/Abstract

摘要：

以eM-Plant系统仿真软件为工具，构建出一个虚拟的双臂自动组合装置。该装置克服了传统解析法的缺点，通过仿真模型来描述与分析半导体加工装置的调度问题，是研究人员研究自动组合装置控制问题的有效手段，也是半导体制造工程师验证生产调度的可行性的仿真平台。

关键词:

晶圆制造；自动组合设备；仿真；eM-Plant

Abstract:

A virtual dual-arm cluster tool for semiconductor fabrication was developed by using eM-Plant. It is a new method based on simulation which can solve the problem that the feasibility of scheduling and control policy cannot be checked analytically because of the wafer residency constraints. Thus, it provides an effective tool for researchers to study the control problem of cluster tools, and check feasibility of scheduling for engineers. 

Key words: wafer fabrication, cluster tool, simulation, eM-Plant

中图分类号:

TP206

李飞, 伍乃骐.

虚拟晶圆制造双臂自动组合装置的实现

[J]. J4, 2009, 20(23): 2871-2875.

LI Fei, WU Ai-Qi.

A Virtual Dual-arm Cluster Tool in Wafer Fabrication

[J]. J4, 2009, 20(23): 2871-2875.

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