关键词: 非硅表面微加工；微型惯性开关；设计与制作；微机电系统（MEMS）

Abstract:

A novel design of MEMS electrical inertia micro-switch was proposed. In the design, an elastic beam with holes was used as the fixed electrode, and a suspended thicker mass block with conjoined snake springs was used as the mobile electrode locating between the supporting layer and the elastic beam. This designed switch structure benefits the improvement of the sensitivity,the contact effect, and protects the switch against intensive shock damage. The micro-switch had been fabricated using cost-effective electroplating nickel and tested subsequently. The result indicates that the response time and the contact time of the micro-switch are about 0.40ms and 12μs respectively when 100g acceleration is applied, which shows relatively better sensitivity and contact effect. This result has an agreement with that of dynamics finite element contact simulation about the designed micro-switch.

Key words: non-silicon surface micromachining, inertia micro-switch, design and fabrication, micro-electro-mechanical system(MEMS)