硅三明治型微机械加速度计温度漂移与敏感结构热膨胀关系研究

中国机械工程 ›› 2013, Vol. 24 ›› Issue (19): 2602-2606.

硅三明治型微机械加速度计温度漂移与敏感结构热膨胀关系研究

戴强1，2;苏伟2;张德2;彭勃2;杨林1

1.西南科技大学制造过程测试技术省部共建教育部重点实验室，绵阳，621010
2.中国工程物理研究院电子工程研究所，绵阳，621900

出版日期:2013-10-10 发布日期:2013-10-11
基金资助:
制造过程测试技术省部共建教育部重点实验室开放基金资助项目（10zxzk07）；四川省教育厅资助重点项目（11ZA134）；西南科技大学博士基金资助项目（10zx7142）
Sichuan Provincial Key Program of Ministry of Education of China（No. 11ZA134）

Research on Relationship between Temperature Drift and Thermal Expansion of Sensing Structure in Sandwich Micro-accelerometer

Dai Qiang1，2;Su Wei2;Zhang De2;Peng Bo2;Yang Lin1

1.Key Laboratory of Testing Technology for Manufacturing Process, Ministry of Education，Southwest University of Science and Technolog，Mianyang,Sichuan,621010
2.Electronic Engineering Research Institute of China Academy of Engineering Physics,Mianyang,Sichuan,621900

Online:2013-10-10 Published:2013-10-11
Supported by:

Sichuan Provincial Key Program of Ministry of Education of China（No. 11ZA134）

摘要/Abstract

摘要：

针对硅基三明治型微加速度计的温度漂移现象，基于力学和热学原理，分析了微加速度计敏感部分关键结构弹性梁、敏感质量块在温度升高时的热膨胀与力学平衡关系变化。结合微加速度计的闭环反馈工作方式，导出了其输出改变，指出由于弹性梁、敏感质量块在温度升高时热膨胀引起的输出变化小于0.002gn/10℃，同时，实验表明微加速度计输出随温度的变化为(0.1~0.2)gn/10℃。两者对比的结果显示，由于温度变化而引起的敏感结构热膨胀导致的输出改变不是微加速度计产生温度漂移的主导原因，研究结果为三明治型微加速度计稳定性与漂移的进一步研究提供了参考。

关键词: 三明治微加速度计, 温度漂移, 敏感结构, 热膨胀

Abstract:

To cope with the temperature drift of sandwich capacitive micro-accelerometer, based on mechanics and thermal principle, the geometrical change of sensing structure due to the thermal expansion was analyzed. Then, in light of the geometrical change and accelerometer's closed loop operation mode, the output change was obtained, which implies that the output variation is less than 0.002gn per 10℃.Meanwhile, an experiment was conducted, which indicates that the output change due to the temperature is from 0.1gn to 0.2gn per 10℃. The results illustrate that the geometrical change is not a dominant reason for temperature drift.

Key words: sandwich micro-accelerometer, temperature drift, sensing structure, thermal expansion

中图分类号:

戴强1，2;苏伟2;张德2;彭勃2;杨林1. 硅三明治型微机械加速度计温度漂移与敏感结构热膨胀关系研究[J]. 中国机械工程, 2013, 24(19): 2602-2606.

Dai Qiang1，2;Su Wei2;Zhang De2;Peng Bo2;Yang Lin1. Research on Relationship between Temperature Drift and Thermal Expansion of Sensing Structure in Sandwich Micro-accelerometer[J]. China Mechanical Engineering, 2013, 24(19): 2602-2606.

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