关键词: 难导电材料, 喷雾, 电化学, 放电, 蚀除方式

Abstract:

Three kinds of difficult-to-conductive hard and brittle materials such as single crystal silicon, optical glass and Al2O3 ceramic were researched with mist-jetting electrochemical discharge method, the machining principle was expounded, and the heat transfer physical model was constructed. Machining discharge waveforms and surface microstructures were analyzed to get the erosion methods of difficult-to-conductive hard and brittle materials. The research results show that, the erosion methods are electrochemical corrosion, electrochemical discharge and chemical dissolution for semiconductor such as silicon; local high temperature generated by electrochemical discharge makes soften layer and chemical dissolution reactes for the insulating materials which is easy to soften such as optical glass; and for the insulating materials with high melting-point, electrochemical discharge can only make soften layer which then removed by mechanical way through ductile regime method.

Key words: difficult-to-conductive material, mist-jetting, electrochemical, discharging, erosion method