关键词: 多边形, 多面体, 凸包算法, 平面与凸多面体相交, 一阶模态

Abstract:

A metrology frame for scanner lithographic machine was created,which was required to set-up optical projector and various nanometer-level measurement sub-system. To meet the requirements with minimized occupied-3D space,position data were collected firstly.That means to define all the interfaces and assembly positions on both metrology frame and measurement frame. Convex hull algorithm of computational geometry was used to settle the metrology frame outside polyhedron profile.Due to the complexity of machine structure, a local modification was followed to improve the model. Furthermore, plate cutting polyhedron algorithm was introduced to design the metrology frame inner structure. Finally, with finite element analysis and verification, a clear improvement can be visualized for both high modal value and low weight material consuming. Design performance target was reached; structure was fit to engineering manufacture.

Key words: polygon, polyhedron, convex hull, plane-convex polyhedron intersection, first modal