中国机械工程 ›› 2011, Vol. 22 ›› Issue (20): 2469-2475.

• 机械基础工程 • 上一篇    下一篇

激光直写法制备仿刚毛微纳阵列的研究

耿路峰1;于敏1;浦东林2;陈林森2;戴振东1
  

  1. 1.南京航空航天大学,南京,210016
    2.苏州大学,苏州,215006
  • 出版日期:2011-10-25 发布日期:2011-11-02
  • 基金资助:
    国家自然科学基金资助项目(60910007,50805076,50705043)
    National Natural Science Foundation of China(No. 60910007,50805076,50705043)

Fabrication of Hierarchical Bio-mimetic Gecko Hair Arrays Based on Laser Direct
Writing 

Geng Lufeng1;Yu Min1;Pu Donglin2;Chen Linsen2;Dai Zhendong1
  

  1. 1.Nanjing University of Aeronautics & Astronautics,Nanjing,210016
    2.Suzhou University,Suzhou,Jiangsu,215006
  • Online:2011-10-25 Published:2011-11-02
  • Supported by:
    National Natural Science Foundation of China(No. 60910007,50805076,50705043)

摘要:

提出一种采用激光直写技术制备微纳阵列的新方法来制备仿壁虎刚毛二级结构微阵列。该制备过程由计算机控制完成。实验制备出具有不同几何尺寸的一级结构阵列,并在此基础上探索制备二级结构微阵列的三种方案,其中,“自上而下”的方案通过对曝光时间和显影时间的控制使第二级结构扎根于第一级结构中,有效提高了两级结构间的连接强度。制备实验的同时,分析了曝光时间、显影时间等参数对阵列制备的影响。激光直写制备微纳阵列的方法具有高效率、低成本的优点。

关键词:

Abstract:

Inspired by gecko attachment system,a new method was proposed to fabricate hierarchical bio-mimetic gecko hair arrays by adopting laser direct writing.The fabrication process was controlled on computer. Single-layer pillars of different radial dimensions and axial dimension were fabricated. Based on the laser direct writing,three fabricating schemes of hierarchical structure were developed.Among them,'top-down method' made the second level structure buried in the structure of the first level by the regulation and control of the exposure time and development time, which effectively improve the connection strength between two arrays. Relationships of exposure depth and exposure time, development depth and development time were also established. This method of
fabricating bio-mimetic gecko hair arrays has advantages of low cost and quantity production. 

Key words: gecko hair, micro-manufacturing, hierarchical structure, laser direct writing

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