近声场, 挤压膜, 弯曲振动, 频率特性

A set of coupled-differential equations of circle stator and squeeze film were achieved based on acoustic near film. The normalized gas motion equation was solved by asymptotic matching methods to the extent that pressure analytic expression in the squeeze film was achieved. On account of the circular structures, this expression was substituted into the stator equation, which was solved in turn using a new formation of triangular unconventional plate element (TRUNC element) for the structural mode shapes and present the final expressions for the pressure distributions and modal shape of the bending vibration. At last, the frequency characteristics under the different depths of squeeze film were analyzed, which proves that driving frequencies of the stator increase with weight of levitated plate. However, this effect decreases when the order of driving frequencies become higher. The test results herein will guide the theoretical and experimental researches and lay the foundation for controlling the lift force in further.

acoustic near film, squeeze film, bending vibration, frequency characteristics