一种环境可控的MEMS微结构离面动态变形测试系统

中国机械工程 ›› 2010, Vol. 21 ›› Issue (1): 67-70.

一种环境可控的MEMS微结构离面动态变形测试系统

谢勇君1,2,3;史铁林1,3;刘世元１;吴健康3

1.华中科技大学数字制造装备与技术国家重点实验室,武汉,430074

2.暨南大学,珠海,519070;;

3.武汉光电国家实验室（筹）,武汉,430074

出版日期:2010-01-10 发布日期:2010-01-22
基金资助:
中国博士后科学基金资助项目(20070410930)；国家自然科学基金资助项目(50775090)；国家863高技术研究发展计划资助项目(2006AA4Z325)；广东省自然科学基金博士研究启动项目(9451063201002281)；广东高校优秀青年创新人才培育项目(LYM08019)；广西制造系统与先进制造技术重点实验室开放课题
Supported by China Postdoctoral Science Foundation（No. 20070410930）;
National Natural Science Foundation of China（No. 50775090）;
National Program on Key Basic Research Project (973 Program)（No. 2006AA4Z325）;
Doctoral Research Starting Program of Guangdong Provincial Natural Science Foundation of China（No. 9451063201002281）

Measurement System for MEMS Microstructures Outofplane Dynamic Deformation with Environmental Control Facility

Xie Yongjun1,2,3;Shi Tielin1,3;Liu Shiyuan1;Wu Jiankang3

1.State Key Laboratory of Digital Manufacturing Equipment and Technology,Huazhong University of Science and Technology,Wuhan,430074 

2.Jinan University,Zhuhai,Guangdong,519070 

3.Wuhan National Laboratory for Opto-electronics,Wuhan,430074

Online:2010-01-10 Published:2010-01-22
Supported by:

Supported by China Postdoctoral Science Foundation（No. 20070410930）;
National Natural Science Foundation of China（No. 50775090）;
National Program on Key Basic Research Project (973 Program)（No. 2006AA4Z325）;
Doctoral Research Starting Program of Guangdong Provincial Natural Science Foundation of China（No. 9451063201002281）

摘要/Abstract

摘要：

利用Linnik显微干涉技术和环境控制技术,研制了一套环境可控的微机电系统(MEMS)微结构离面动态变形测试系统，该系统可测量不同温度、不同压力下MEMS微结构的离面动态变形情况。测试系统的环境控制装置可提供0~300℃的温度变化和0.1~0.6MPa的压力变化。利用测试系统对不同压力下绝压型硅微压力传感器膜的动态变形以及不同温度下微电路板的变形形貌进行了测量，其中绝压型硅微压力传感器膜变形量的测量重复性误差小于20nm。

关键词:

MEMS 微结构, 动态变形, 环境控制, 显微干涉

Abstract:

A measurement system for MEMS microstructures dynamic deformation with environmental control facility was presented. The system integrated Linnik microscopic interferometry and environmental control technology,thus it was able to measure MEMS microstructures out-of-plane dynamic deformation under variable pressures and/or temperature.The environmental control facility can generate variable pressures in 0.1~0.6MPa and variable temperature in 0~300℃.The experimental work conducted on absolute pressure sensor membranes under variable pressures and micro-printed-circuit-boards under variable temperature confirms that such a measurement system is effective and efficient to characterize MEMS microstructures out-of-plane dynamic deformation.The error of measurement repeatability for the deformation of pressure sensor membranes is less than 20nm.

Key words: MEMS microstructure, dynamic deformation, environmental control, microscopic interferometry

中图分类号: