微压印；抗蚀剂流动, 占空比, 单双峰, 宽厚比

Aiming at analyzing the flow behavior of low-viscosity resist used for room-temperature micro imprinting and its impact on the fidelity of pattern transfer,CFD(computational fluid dynamics) finite element simulation was conducted.Variations in tool geometry,resist thickness and micro imprinting working condition affected resist filling modes greatly.Finally,single-dual peak transfer curves and filling efficiency curves were plotted.The resist’s flow behavior was analyzed from both theory and experiments.The research here seeks to investigate the resist’s flow behavior and provides theoretical basis for optimizing fidelity of pattern transfer.

micro imprinting, flow behavior, mold duty ratio, single-dual peak, width/thickness ratio