粗精动超精密运动平台系统建模与分析研究

J4 ›› 2008, Vol. 19 ›› Issue (23): 0-2776.

• 机械科学 •

粗精动超精密运动平台系统建模与分析研究

杨一博;尹文生;朱煜;王春洪

收稿日期:1900-01-01 修回日期:1900-01-01 出版日期:2008-12-10 发布日期:2008-12-10

Modeling and Analyzing for Ultra-precision Coarse-fine Stage

Yang Yibo;Yin Wensheng;Zhu Yu;Wang Chunhong

Received:1900-01-01 Revised:1900-01-01 Online:2008-12-10 Published:2008-12-10

摘要/Abstract

摘要：

建立了气浮支撑粗精动超精密运动平台系统理论模型。在分析了系统中存在的位置耦合与力耦合的特性以及系统模型随平台质量比的变化产生的模型特性变化的基础上，用矩阵分式形式描述了系统的传递函数矩阵并分析了系统的能控性与能观性。基于建立的模型设计了LQG多输入多输出运动控制器并进行了运动平台控制仿真，结果表明，通过抑制气浮粗精动平台中产生的耦合作用可提高系统动态性能。

关键词: 粗精动；力耦合；建模；LQG控制器

Abstract:

This paper discussed the model of air-bearing coarse-fine positioning stage. It analysed the positioning and force coupling as well as the model’s change during the mass ratio of coarse stage to fine stage changing. Moreover this paper analysed the controllability and observability using the matrix-fraction description. And a MIMO LQG controller was designed based on this coarse-fine stage model. The result of the simulation shows that the MIMO LQG controller can effectively restrain the coupling and improve the positioning property.

Key words: coarse-fine, force coupling, modeling, LQG controller

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