Study on Ultrasonic-assisted Femtosecond Laser Ablation Mechanism and Process of Silicon Carbide Ceramics
LIN Yingliang, CHEN Xiaoxiao, MA Chenbin, LI Qi, ZHANG Wenwu
China Mechanical Engineering . 2026, (8): 2029 -2037 .  DOI: 10.3969/j.issn.1004-132X.2026.08.022