Research on Inertial Drives of Two-degree-of-freedom Ultrasonic Motors

Abstract

Abstract: A novel two-degree-of-freedom ultrasonic motor with a single stator was designed， which required a single-phase power to drive rotary and linear motions.A SIDM was proposed which was close to the resonant frequencies.The inertial drive models of the motor was established based on motor construction mechanism and driving principles.The influences of square wave signal parameters on motor performances were analyzed quantitatively.The simulation examples show that the stator surfaces may output suitable sawtooth waves using the asymmetric square wave excitations near the resonant frequencies.The optimum drive frequencies and duty cycles of the square waves are also given.The simple and efficient drive method may eliminate the influences of the phase differences on multiple degree-of-freedom motor performances totally.

Key words: two-degree-of-freedom, ultrasonic motor, drive model, asymmetric square wave, smooth impact drive method （SIDM）

摘要： 设计了采用单相电源驱动旋转和直线两种运动的新型单定子二自由度超声波电机，提出了一种近谐振点平稳惯性冲击的电机驱动方法。基于电机构造机理和驱动原理，建立了电机惯性驱动模型，定量分析了方波信号参数对电机性能的影响。算例分析表明，电机在近谐振点采用非对称方波激励，定子端面可输出符合惯性驱动要求的锯齿波。给出了最佳的方波驱动频率与占空比。该驱动方法简洁高效，完全消除了相位差对多自由度电机性能的影响。

关键词: 二自由度, 超声波电机, 驱动模型, 非对称方波, 平稳惯性冲击方法

CLC Number:

TM356

WANG Jian;BAI Yang;GUO Jifeng. Research on Inertial Drives of Two-degree-of-freedom Ultrasonic Motors[J]. China Mechanical Engineering.

王剑;白洋;郭吉丰. 二自由度超声波电机惯性驱动研究[J]. 中国机械工程.

References

[1]赵淳生.超声电机技术与应用[M].北京：科学出版社，2007.
ZHAO Chunsheng.Ultrasonic Motors Technologies and Applications[M].Beijing： Science Press，2007.
[2]邢继春，许立忠.旋转惯性压电电机最优驱动方案分析[J].中国机械工程，2014，25（18）：2451-2455.
XING Jichun， XU Lizhong.Analysis of Optimal Driving of Rotary Inertial Piezoelectric Motor[J].China Mechanical Engineering，2014，25（18）：2451-2455.
[3]MORITA T，YOSHIDA R，OKAMOTO Y，et al.A Smooth Impact Rotation Motor Using a Multi-layered Torsional Piezoelectric Actuator[J].IEEE Transactions on Ultrasonics，Ferroelectrics and Frequency Control，1999，46（6）：1439-1445.
[4]MORITA T，YOSHIDA R，OKAMOTO Y，et al.Three DOF Parallel Link Mechanism Utilizing Smooth Impact Drive Mechanism[J].Precision Engineering，2002，26（3）：289-295.
[5]NISHIMURA T，HOSAKA H，MORITA T.Resonanttype Smooth Impact Drive Mechanism（SIDM） Actuator Using a Bolt-clamped Langevin Transducer [J].Ultrasonics，2012，52（1）：75-80.
[6]卢秋红，高志军，颜国正，等.压电型惯性微驱动器研究[J].压电与声光，2004，26（2）：112-115.
LU Qiuhong，GAO Zhijun，YAN Guozheng，et al.The Study on Miniature Inertial Piezo-actuators[J].Piezoelectric & Acoustooptics，2004，26（2）：112-115.
[7]张宏壮，程光明，曾平，等.压电双晶片型2自由度精密驱动器的动态特性[J].机械工程学报，2007，43 （2）：87-91.
ZHANG Hongzhuang，CHENG Guangming，ZENG Ping，et al.Dynamic Characteristics of 2-DOF Precision Positioning Device Utilizing Impact Force of End-loaded Piezoelectric Cantilever Bimorphs[J].Journal of Mechanical Engineering，2007，43（2）：87-91.
[8]姜楠，刘俊标，方光荣，等.惯性冲击式压电微电机的研究[J].压电与声光，2007，29（2）：187-189.
JIANG Nan，LIU Junbiao，FANG Guangrong，et al. Research on Impact Drive Mechanism Piezoelectric Micro-motor[J].Piezoelectric & Acoustooptics，2007， 29（2）：187-189.
[9]KANG C Y，YOO K H，KO H P，et al.Analysis of Driving Mechanism for Tiny Piezoelectric Linear Motor[J].Journal of Electroceramics，2006，17（214）：609-612.
[10]周昇，黄卫清，朱华，等.惯性冲击式压电精密定位装置的设计[J].机械科学与技术，2016，35（7）：992-997.
ZHOU Sheng，HUANG Weiqing，ZHU Hua，et al. Design of Piezoelectric Precision Positioning Device based on Inertial Impaction[J].Mechanical Science and Technology for Aerospace Engineering，2016，35 （7）：992-997.
[11]TUNCDEMIR S，URAL S O，KOC B，et al.Design of Translation Rotary Ultrasonic Motor with Slanted Piezoelectric Ceramics[J].Japanese Journal of Applied Physics，2011，50：027301.
[12]王剑，白洋，郭吉丰 .旋转-直线型两自由度超声波电机建模与设计[J].电工技术学报，2013，28（11）：48-53.
WANG Jian，BAI Yang，GUO Jifeng.Modeling and Optimal Design of the Rotary-linear Type Two-degree-of-freedom Ultrasonic Motor[J].Transactions of China Electrotechnical Society，2013，28（11）：48-53.
[13]BAI Y，TUNCDEMIR S，GUO J F，et al.Analysis of Longitudinal and Torsional Resonance Vibrations of a Piezoelectrically Excited Bar by Introducing Piezoelectric Loss Coefficients[J].Journal of Intelligent Material Systems and Structures，2012，23（4）：453-462.

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