Research on Removal Mechanism of μ-LAM of ZnSe Crystal

doi:10.3969/j.issn.1004-132X.2026.09.022

Abstract

Abstract:

Comparative experiments between μ-LAM and traditional ultra-precision machining were carried out. The effect of laser power of μ-LAM on surface morphology and surface quality was analyzed， and the optimal machining parameters were obtained. To reveal the mechanism of μ-LAM， variable-temperature nanoindentation technique was employed， and temperature-dependent mechanical properties were investigated. Under the same cutting conditions， the results show that the surface quality is improved significantly with μ-LAM. However， excessive laser power may lead to deterioration of surface quality. The best surface quality with surface roughness of 3.97 nm is realized at a laser power of 2.34 W. The hardness and elastic modulus of ZnSe crystal decrease with increasing temperature， resulting in an increase in plasticity.

Key words: ZnSe crystal, micro laser-assisted machining（μ-LAM）, Raman spectrum, surface quality, laser power

摘要：

进行了硒化锌晶体在传统超精密加工和微激光辅助切削（μ-LAM）的对比实验，分析了μ-LAM时激光功率对表面形貌、表面质量的影响规律，获得了最优工艺参数。为揭示μ-LAM机理，采用变温纳米压痕技术分析了硒化锌的力学性能随温度的变化规律。研究表明，在相同的切削条件下，μ-LAM能够显著改善工件的表面质量，但激光功率过大会导致表面质量的恶化，在最优激光功率2.34 W下，可获得最优表面质量，其表面粗糙度为3.97 nm；硒化锌的硬度和弹性模量随着温度的升高而降低，最终改善了材料塑性。

关键词: 硒化锌晶体, 微激光辅助切削, 拉曼光谱, 表面质量, 激光功率

CLC Number:

TH161

GENG Ruiwen, YANG Weihua, XIE Qiming, TIAN Zhuxin, LI Lijun, WU Haihua. Research on Removal Mechanism of μ-LAM of ZnSe Crystal[J]. China Mechanical Engineering, 2026, 37(9): 2298-2304.

耿瑞文, 杨蔚华, 谢启明, 田助新, 李立军, 吴海华. 微激光辅助切削硒化锌晶体去除机理研究[J]. 中国机械工程, 2026, 37(9): 2298-2304.

Figures/Tables 11

Fig.1 The μ-LAM experimental setups

Fig.2 Surface/subsurface characteristics detecter

Fig.3 μ-LAM ZnSe crystal process

Fig. 4 FESEM image of machined surface under different laser powers

Fig.5 FESEM image of surface defects under different laser powers

Fig.6 Surface roughness under different laser powers

Fig.7 The max temperature of sample surface under different laser powers

Fig.8 Raman spectra of machined surface under traditional ultra-precision machining andμ-LAM

Fig.9 Raman spectra of chips under traditional ultra-precision machining andμ-LAM

Fig.10 Curves of load and indentation depth for ZnSe crystal under different temperatures

Fig.11 Elastic modulus and hardness of ZnSe crystal under different temperatures

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