Imaging Distortion Analysis and Optical Path Optimization of Tooth Surface Interferometry Systems

doi:10.3969/j.issn.1004-132X.2022.10.011

China Mechanical Engineering ›› 2022, Vol. 33 ›› Issue (10): 1219-1225.DOI: 10.3969/j.issn.1004-132X.2022.10.011

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Imaging Distortion Analysis and Optical Path Optimization of Tooth Surface Interferometry Systems

WANG Zhaohui1;YANG Pengcheng1 ;XU Jin1;LIANG Pujia1;ZHU Xindong2

1.College of Mechanical and Electrical Engineering，Xian Polytechnic University，Xian，710048
2.State Key Laboratory of Manufacturing Systems Engineering，Xian Jiaotong University，Xian，710049

Online:2022-05-25 Published:2022-06-09

齿面干涉测量系统的成像畸变分析与光路优化

王兆辉1;杨鹏程1;徐晋1;梁蒲佳1;朱新栋2

1.西安工程大学机电工程学院，西安，710048
2.西安交通大学制造系统工程国家重点实验室，西安，710049

通讯作者: 杨鹏程（通信作者），男，1985年生，副教授。研究方向为精密干涉测量、光机电一体化技术等。发表论文20余篇。E-mail：yangpengcheng@xpu.edu.cn。
作者简介:王兆辉，男，1996年生，硕士研究生。研究方向为精密干涉测量。
基金资助:
陕西省自然科学基础研究计划（2022JM-219）；
广东省企业重点实验室开放基金（2021B1212050012-05）；
西安工程大学研究生创新基金（chx2021008）

Abstract

Abstract: Aiming at the tooth surface image shape distortions caused by object optical path errors， three factors that might lead to tooth surface image shape distortions were analyzed by using accurate ray tracing algorithm， the main error sources of tooth surface image shape distortions were defined， the judgment model of tooth surface image shape distortions was established， and the mapping relationship between tooth surface image shape distortions and gear axis inclination was established. An object optical path optimization method was proposed based on the shape distortions of tooth surface images. Finally， the experimental verification was carried out， and the results show that the error ranges are controlled at about 2%， which prove the rationality and correctness of the proposed method.

Key words: laser interference, interferogram, tooth surface image, shape distortion

摘要： 针对由物体光路误差导致的齿面像形状畸变现象，利用精确光线追迹算法分析了可能导致齿面像形状畸变的三种因素，明确了齿面像形状畸变的主要误差来源，建立了齿面像形状畸变的判断模型，确立了齿面像形状畸变和齿轮轴线倾斜之间的映射关系，提出了基于齿面像形状畸变特征的物体光路优化方法。最后进行了实验验证，结果表明误差控制在2%左右，证明了所提方法的合理性与正确性。

关键词: 激光干涉, 干涉条纹, 齿面像, 形状畸变

CLC Number:

TN249

WANG Zhaohui, YANG Pengcheng , XU Jin, LIANG Pujia, ZHU Xindong. Imaging Distortion Analysis and Optical Path Optimization of Tooth Surface Interferometry Systems[J]. China Mechanical Engineering, 2022, 33(10): 1219-1225.

王兆辉, 杨鹏程, 徐晋, 梁蒲佳, 朱新栋. 齿面干涉测量系统的成像畸变分析与光路优化[J]. 中国机械工程, 2022, 33(10): 1219-1225.

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Imaging Distortion Analysis and Optical Path Optimization of Tooth Surface Interferometry Systems

齿面干涉测量系统的成像畸变分析与光路优化

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