Abstract:

A  general  expression of spline filter was proposed and the linear spline filter,robust  spline filter and general spline filter could  be  derived from this expression.The general  spline filter kept  the characteristics of the linear spline filter partly,and had  the  characteristics of  robustness.Using Tucky estimation,all of  the  three kinds of spline filter were compared in surface metrology. The experimental  results show  that the rubost spline filter is more suitable while there are  some deep valleys and high peaks in the surface;the roughness parameters of all spline filters are close while the surface approximately fits normal distribution.

摘要：

提出了样条滤波器的一般化表达式，由该表达式可以构造线性样条滤波器、稳健样条滤波和一般样条滤波器。一般样条滤波器保留了部分线性样条滤波器的特性，又具有稳健性。采用Tucky估计,分别采用一般样条滤波器、线性样条滤波器与稳健样条滤波器在表面计量中进行了对比实验,实验结果表明:当表面存在明显的深谷和尖峰时，采用稳健样条滤波器更为合适；当表面近似服从正态分布时，三种滤波器得到的表面粗糙度参数比较接近。

关键词: 表面计量, 样条滤波器, 稳健性, 滤波中线