Abstract:

This paper firstly presented the recent research situations in the micromechanics testing technique and the problems in characterization of mechanics properties. Then the techniques about actuators, micro displacement sensors, and micro force sensors were discussed and compared respectively as they were main parts in microscale mechanics testing. 

Key words: MEMS, mechanics property, actuator, micro displacement sensor, micro force sensor

摘要：

阐述了微构件力学性能的研究现状与存在的力学性能参数表征问题，而后重点介绍了微构件力学性能测试中相关的驱动方式、微位移检测和微力检测技术。

关键词: 微机电系统, 力学性能, 驱动, 微位移检测, 微力检测