A-Zernike Moment Based Calibration Method for Positioning Errors of Precision Motion Stages
DENG Shuchao, HU Aokang, TONG Baohong, ZHENG Jinde, WANG Lu
China Mechanical Engineering . 2026, (9): 2092 -2100 .  DOI: 10.3969/j.issn.1004-132X.2026.09.002