Abstract: The kinematics of a new parallel micromanipulator driven by piezoelectric ceramic was analyzed. The D-H method was used to make analyses on the position of a micro-platform and deducing the expressions of the micro-platform's inverse solution. On the basis of the error analyses on a single branch, a terminal error model was established, and the errors were analyzed. The research fruits have a certain guiding significance for the design and manufacture of 3-RRRRR parallel micro-mechanism.

Key words: 3-RRRRR, parallel micro platform, position analysis, error analysis

摘要：

对一种新提出的由压电陶瓷驱动的并联微动平台进行了运动学分析。采用D-H法对该微动平台进行了位置分析，推导出了微动平台的反解表达式；在对单分支进行误差分析的基础上，建立了该并联微动平台的末端误差模型，并进行了误差分析。研究结果对3-RRRRR并联微动平台的设计和制造有参考价值。

关键词: 3-RRRRR; , 并联微动平台; , 位置分析; , 误差分析