Effect of Flexible Microvalveson on Pressure Performance of Electrostatically Actuated Micropumps

Abstract

Abstract:

The effect of electrostatically actuated flexible microvalves on the pressure performance of electrostatic micropumps was analyzed by combining energy minimization and the analytical solution for membrane deformation under uniform pressure. The introduction of the valve volume yields a certain decrease in the pressure rise of the micropump, but the decreasing percentage is much lower than that generated by the valve volume on ordinary pumps with constant stroke. Moreover, as the valve plates of the microvalves were made of flexiblemembrane, the voltage for valve closing is much lower than the cavity actuation, leading to an enhancement in the reliability of the micropumps and microvalves.

Key words: micropump, microvalve, electrostatic, flexible membrane

摘要：

将最小能量法与均匀压力载荷下圆薄膜大变形半解析解相结合，分析了静电驱动柔性微型阀对静电驱动振膜微泵压升性能的影响。微型阀容积的引入会导致静电驱动振膜微泵的压升出现一定程度的降低，但降低幅度远小于阀门容积对常规定排量泵的影响。微型阀的阀片以柔性薄膜为基片，因此所需的关阀电压远远低于微泵泵腔的驱动电压，从而使静电微泵和微型阀运行的可靠性得到了极大的提高。

关键词: 微泵, 微型阀, 静电驱动, 柔性振膜

CLC Number:

TH38
TP271.3

Zhang Yu, Wang Wen, Zhao Xiaolin, Ding Guifu. Effect of Flexible Microvalveson on Pressure Performance of Electrostatically Actuated Micropumps[J]. China Mechanical Engineering, 2014, 25(1): 92-96,102.

张彧, 王文, 赵小林, 丁桂甫. 柔性微型阀对静电驱动振膜微泵压力性能的影响[J]. 中国机械工程, 2014, 25(1): 92-96,102.

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