Study on Depth of Subsurface Crack Layer by Free and Fixed Abrasive Lapping

China Mechanical Engineering ›› 2013, Vol. 24 ›› Issue (07): 895-898,905.

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Study on Depth of Subsurface Crack Layer by Free and Fixed Abrasive Lapping

Li Biao;Li Jun;Gao Ping;Zhu Yongwei;Luo Haijun;Zuo Dunwen

Nanjing University of Aeronautics and Astronautics,Nanjing,210016

Online:2013-04-10 Published:2013-04-27
Supported by:

National Natural Science Foundation of China（No. 50905086）;

Jiangsu Provincial Natural Science Foundation of China（No. BK2010512）

游离磨料和固结磨料研磨后亚表面裂纹层深度研究

李标;李军;高平;朱永伟;罗海军;左敦稳

南京航空航天大学,南京,210016

基金资助:
国家自然科学基金资助项目（50905086）；江苏省自然科学基金资助项目(BK2010512)；南京航空航天大学研究生创新基地（实验室）开放基金资助项目(kfjj20110220)；南京航空航天大学大学生创新训练计划资助项目
National Natural Science Foundation of China（No. 50905086）;

Jiangsu Provincial Natural Science Foundation of China（No. BK2010512）

Abstract

Abstract:

Different depths of subsurface crack layer were generated by different lapping ways. Measurement of subsurface crack layer depth had important significance for determining the material removal amount in subsequent process and improving processing efficiency. Magnetorheological finishing spotting method was adopted to measure the depth of subsurface crack layer after free and fixed abrasive lapping of K9 glass, respectively. The abrasive sizes of W40 and W14 were selected in each lapping way. The results show that the depths of subsurface crack layer after lapping K9 glass by free abrasive with 40μm and 14μm particle size are as 20.1μm and 3.646μm, respectively. And the corresponding depths are as 3.37μm and 0.837μm after fixed abrasive lapping. Fixed abrasive lapping can reduce the depth of surface crack layer effectively, improve processing efficiency and surface quality, and enhance the device performance. 

Key words: K9 glass, free abrasive lapping, fixed abrasive lapping, magnetorheological polishing spotting method, subsurface crack layer depth

摘要：

不同研磨方式加工K9玻璃产生不同的亚表面裂纹层深度,亚表面裂纹层深度的测量对确定材料下一步的加工去除量和提高加工效率具有重要意义。利用磁流变抛光斑点法测量游离磨料和固结磨料两种方式研磨后的亚表面裂纹层深度,每种研磨方式选用粒径分别为W40和W14的两种磨料。结果表明：磨粒粒径为W40和W14的游离磨料研磨后K9玻璃的亚表面裂纹层深度分别为20.1μm和3.646μm,而对应固结磨料研磨后的深度分别为3.37μm和0.837μm。固结磨料研磨在加工过程中能有效减小K9玻璃的亚表面裂纹层深度,提高加工效率和工件表面质量,改善器件的性能。

关键词: K9玻璃, 游离磨料研磨, 固结磨料研磨, 磁流变抛光斑点法, 亚表面裂纹层深度

CLC Number:

TG580.68

LI Biao, LI Jun, GAO Beng, SHU Yong-Wei, LUO Hai-Jun, ZUO Dui-Wen. Study on Depth of Subsurface Crack Layer by Free and Fixed Abrasive Lapping[J]. China Mechanical Engineering, 2013, 24(07): 895-898,905.

李标, 李军, 高平, 朱永伟, 罗海军, 左敦稳. 游离磨料和固结磨料研磨后亚表面裂纹层深度研究[J]. 中国机械工程, 2013, 24(07): 895-898,905.

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Study on Depth of Subsurface Crack Layer by Free and Fixed Abrasive Lapping

游离磨料和固结磨料研磨后亚表面裂纹层深度研究

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