Abstract:

Using PVDF piezoelectric film and PZT-actuators, combined with a tungsten probe derived from electrochemical grinding, a new scanning stylus with a symmetrical structure of tapping mode was developed. In the stylus, PVDF piezoelectric film as a vibrating beam and the tungsten probe fixed below the middle of the beam were in the state of resonance driven by the PZT. At the same time, PVDF film as a micro-force sensor to probe the atomic force between the top of probe and the surface of sample. A new SPM system was constituted from the constructed probe combined with three-dimensional locator and control procedures etc. This paper described such contents as the composition, working principle, characteristics of the stylus, in addition, the overall structure, measuring principle, three-dimensional positioning table control, signal processing and properties of the whole system test of the SPM system were also described, and three-dimensional image scanning was completed by taking a standard one-dimensional raster as the specimen, and the feasibility and effectiveness of the new SPM system were proved.

Key words: PVDF(polyvinilidene fluoride) vibrating beam, tungsten tip, positioning control, scanning probe microscopy(SPM)

摘要：

采用聚偏氟乙烯(PVDF)压电薄膜和压电陶瓷(PZT),并结合由电化学研磨得到的钨探针,研制了一种具有对称结构的新型轻敲模式扫描测头。在该测头中,PVDF压电薄膜作为振动梁,其下方中间位置固定有钨探针,在PZT的驱动下,PVDF和探针处于谐振振动状态,同时,PVDF作为微力传感器检测探针顶端原子与试样表面原子间的作用力。所构建测头结合三维纳米定位台、控制程序等构成了新型扫描探针显微镜系统。介绍了测头的构成、工作原理、特性以及SPM系统的整体结构、测量原理、三维工作台的定位控制、信号处理过程和整系统特性测试,并以一维标准光栅为试样进行三维图像扫描,证明了该新型扫描探针显微镜系统的可行性和有效性。

关键词: PVDF振动梁, 钨探针, 定位控制, 扫描探针显微镜