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ISSN 1004-132X
CN 42-1294/TH
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中文
Research on Dry Etching Processes on PSSs
HOU Xiang, LIU Yixin, ZHONG Mengjie, LIN Sai, LIU Yang, LUO Ronghuang, LUO Xuetao, ZHANG Sa,
China Mechanical Engineering . 2021, (
24
): 3001 -3007 . DOI: 10.3969/j.issn.1004-132X.2021.24.014
