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ISSN 1004-132X
CN 42-1294/TH
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中文
Research on Hysteresis Compensation Method of MEMS Piezoelectric Vibratory Platforms
HAO Rui, PENG Bei, ZHOW Wu
China Mechanical Engineering . 2021, (
17
): 2118 -2124 . DOI: 10.3969/j.issn.1004-132X.2021.17.013
