Contact States of Workpiece-Abrasive Particles-Polishing Pad in Cemented Carbide CMP Processes
MAO Meijiao, XU Qing, LIU Jingli, YUAN Julong, LI Min, HU Zihua
China Mechanical Engineering . 2021, (17): 2074 -2081 .  DOI: 10.3969/j.issn.1004-132X.2021.17.008

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