激光改性后氮化铝基板的可加工性研究
陈妮, 韦佳伟, 张鑫磊, 李亮, 何宁
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CHEN Ni, WEI Jiawei, ZHANG Xinlei, LI Liang, HE Ning
中国机械工程 . 2021, (23): 2817 -2882 .  DOI: 10.3969/j.issn.1004-132X.2021.23.005