基于混合式特征选择模型的晶圆允收测试关键参数识别方法
吕佑龙;许鸿伟;郑城;张洁;郑鹏
#br# Wafer Acceptance Test Key Parameter Identification Based on Hybrid Feature Selection Method
LYU Youlong;XU Hongwei;ZHENG Cheng;ZHANG Jie;ZHENG Peng
中国机械工程
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2020, (16): 1978
-1984,1997
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DOI: 10.3969/j.issn.1004-132X.2020.16.010
