关键词: ELID磨削;磁流变光整加工（MRF）, 超精密组合加工;形状精度;表面粗糙度;光学材料

Abstract:

An ultra-precision synergistic finishing process integrated to magneto-rheological finishing (MRF) and electrolytic in-process dressing (ELID) grinding was proposed for shortening total finishing time and improving finishing quality. A lot of nano-precision experiments were carried out to grind and finish some optical materials such as glass, silicon, silicon carbide, etc. ELID grinding, as pre-finishing,was employed to obtain high efficiency and high surface quality; and then, MRF, as the final finishing,was employed to improve further surface roughness and form accuracy. In general, form accuracy of ~λ/20(λ is a wavelenght unit,λ=632.8nm) peak-to-valley (P-V) and surface roughness less than 10 Angstrom unit are produced in high efficiency.

Key words: electrolytic in-process dressing (ELID) grinding, magneto-rheological finishing(MRF), ultra-precision synergistic finishing process, form accuracy, surface roughness, optical material