压电陶瓷驱动的超精密快刀伺服系统的设计与研制

J4 ›› 2009, Vol. 20 ›› Issue (22): 0-2653.

• 科学基金 •

压电陶瓷驱动的超精密快刀伺服系统的设计与研制

戴一帆;杨海宽;王贵林;杨帆;吴宇列

收稿日期:1900-01-01 修回日期:1900-01-01 出版日期:2009-11-25 发布日期:2009-11-25

Design and Development of an Ultra-precision Fast Tool Servo System Driven by
Piezoelectric Ceramic 

Dai Yifan;Yang Haikuan;Wang Guilin;Yang Fan;Wu Yulie

Received:1900-01-01 Revised:1900-01-01 Online:2009-11-25 Published:2009-11-25

摘要/Abstract

摘要：

以压电陶瓷和柔性铰链作为驱动平台，系统地研究了面向快速车削加工的刀具伺服装置的设计、运动建模与研制方法。测试结果表明，研制的快刀伺服装置定位误差为7.7nm，重复定位误差为4.4nm，线性度优于0.145%，运动距离为
39.0μm时响应频率达到了218Hz，能够满足复杂面形零件或结构的超精密快速车削加工要求，为以后该快刀系统在实际加工中更广范围的应用研究打下了基础。

关键词: 快刀伺服；复杂面形；压电陶瓷；柔性铰链

Abstract:

Based on piezoelectric actuator and flexure hinge platform, the design,motion modeling and development of FTS device were studied systematically herein. The testing results indicate that the positioning errors are less than 7.7nm, the repetitive positioning error is less than 4.4nm,the linearity precedes 0.145% and the frequency response precedes 218Hz at 39.0μm travel range for self-developed FTS system, and these
performances can completely satisfy the machining requirements for the elements or structures with complex form.A good foundation for future use was built in real manufacture.

Key words: fast tool servo(FTS);complex form;piezoelectric ceramic(PZT);flexure hinge

中图分类号:

TG506

戴一帆;杨海宽;王贵林;杨帆;吴宇列;. 压电陶瓷驱动的超精密快刀伺服系统的设计与研制[J]. J4, 2009, 20(22): 0-2653.

Dai Yifan;Yang Haikuan;Wang Guilin;Yang Fan;Wu Yulie. Design and Development of an Ultra-precision Fast Tool Servo System Driven by
Piezoelectric Ceramic [J]. J4, 2009, 20(22): 0-2653.

[1]	杨帆;戴一帆;王贵林;杨海宽;吴宇列;. 复杂面形/结构零件的快速伺服车削技术[J]. J4, 2009, 20(21): 0-2531.
[2]	葛英飞;徐九华;杨辉;罗松保;. SiCp/2024Al复合材料超精密车削刀具磨损机理研究[J]. J4, 2009, 20(11): 0-1385.
[3]	宋新玉;赵军;姜俊玲;. 加工Inconel 718时陶瓷刀具的磨损机理[J]. J4, 2009, 20(07): 0-762.
[4]	白万金;柯映林;吴红兵;董辉跃;. 航空薄壁件对称及阶梯对称铣削的数值仿真与分析[J]. J4, 2009, 20(02): 0-130.
[5]	袁启龙;李言;郑建明;李鹏阳. 板式翅片滚压成形过程仿真[J]. J4, 2008, 19(12): 0-1392.
[6]	肖茂华;何宁;李亮;刘海滨;. 陶瓷刀具高速切削镍基高温合金沟槽磨损试验研究[J]. J4, 2008, 19(10): 0-1139.

压电陶瓷驱动的超精密快刀伺服系统的设计与研制

Design and Development of an Ultra-precision Fast Tool Servo System Driven by
Piezoelectric Ceramic 

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压电陶瓷驱动的超精密快刀伺服系统的设计与研制

Design and Development of an Ultra-precision Fast Tool Servo System Driven by Piezoelectric Ceramic 

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Design and Development of an Ultra-precision Fast Tool Servo System Driven by
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