关键词: 微机械；陀螺；性能变异；检测电容；加工误差

Abstract:

This paper focused on a tuning fork vibratory micromachined gyroscope which was fabricated through silicon bulk microprocessing technology. From the view of the parametric design, we analysed the effects of the key parameters on performance variation caused by fabrication errors for final detection capacitance. The equations of natural frequency and total detection capacitance were obtained by the dynamical analysis for this gyroscope. Two key parameters which affect the performance greatly are achieved with the analysis of the amplitude frequency response of opposite-and inphase-direction-detection capacitance and useful recommendations for the design and the fabrication are consequently suggested. The experimental results have good agreement with the simulation ones.The symmetry of the left and right structure of the gyroscope is very important for the performance of the gyroscope. The work herein presents the effects of key parameters variation caused by fabrication errors on performance of the gyroscope, and has an important reference theoretical basis for further performance improvement of the gyroscope.

Key words: MEMS, gyroscope, performance variation, detection capacitance, fabrication error