关键词: 微拉伸测试；轴向对准；弹性模量；单晶硅

Abstract:

An off-chip actuated tensile test device was developed for the mechanical properties characterization of micromechanical structures. A load cell with a 0.25mN-precision level and a displacement sensor with 0.1μm-precision level were equipped. Elastic coefficient of the tensile tester was calibrated with force and displacement sensors in situ, and the deformation of gauge section was obtained using two-serial spring model. To improve precision and repeatability of the measurement, a simple alignment and gripping mechanism was presented using concave-convex slides to align specimens in axial and rosin-ethanol solution to conglutinate. The tensile tester is capable of measuring elastic modulus and fracture strength of specimens. The elastic modulus of single crystal silicon in 〈110〉 is 167±5GPa resulting from the testing results and the measurement errors were analyzed.

Key words: micro-tensile testing, axial alignment, elastic modulus, single crystal silicon